Remote spots: Static models are typically positioned remotely, escalating Price and reducing Over-all procedure performance.
Instrument & TCU application calibration methods range external exam devices not applied consistently for verifying
Together with the POU3500, you are able to accomplish unprecedented leads to etch general performance, chamber uptime, diminished expense of ownership and fab Place utilization – all even though improving your system dependability.
We embrace private accountability and take duty for prudent threat using. We stimulate particular values, which tutorial us to continually satisfy the commitments we make and we endeavor to take care of People with whom we communicate with regard as we wish to be taken care of ourselves.
LAUDA-Noah will, for any buyer's retrofit analysis, check and alter its fluid temperature Manage profiles to match an present TCUs' as a way to ensure a smooth method integration by means of DAQ.
The accuracy in the POU 3300 allows for unbiased Charge of the method fluid temperature to your wafer chuck inside of +/- 0.1 °C of established point, as well as the speedy reaction time of the procedure enables for optimum wafer-to-wafer repeatability through the etch procedure.
All static TCUs involve excess cooling & heating capacities because of their incredibly huge procedure fluid reservoirs. The process fuid reservoir on LAUDA-Noah's dynamic temperature Handle procedure is fewer than 1 gallon.
With our unit strategically mounted somewhere around 6 ft with the chamber, we achieve a way more correct examining of your chuck temperature. This method makes sure reliable temperature throughout the production lot, resulting in improved wafer-to-wafer CD uniformity.
Large Footprint: Static units occupy sizeable Place inside the fabrication tool region, reducing its performance.
LAUDA-Noah is Assembly these new challenges and it has integrated Vitality conserving engineering in techniques that happen to be pleasant to your environment and have a low price to operate.
the information set Here's from the 200mm quantity generation wafer fab and clearly illustrates the good thing about the LAUDA-Noah POU process.
greater than ever, shrinking product geometries, demanding new procedures and also a really competitive environment have to have temperature control techniques that Incorporate fast and exact temperature Command with the emphasis on reduced running fees and improved dependability.
verified; TEs' characterize just one Portion of a chiller's design and style. The switching & Command strategies used by a chiller will effects the TEs' reliability.
(consequently, putting in a static unit next to chamber won't permit it to deliver dynamic temperature Regulate)
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